Engineering Hall was constructed in 1985 to house the clean-room laboratories, computer labs, and offices for the nation's first undergraduate program in Microelectronic Engineering.
The building also houses the Microsystems PhD program, affiliated research space and various computer engineering labs. The clean-room facility, called the Semiconductor and Microsystems Fabrication Laboratory (SMFL), occupies 15,000 square feet of class 1,000 space. The equipment set in the SMFL includes laser mask making, ion implantation, i-line lithography, plasma etch, CVD and PVD tools, furnaces and metrology. The lab supports a complete 150mm CMOS process line.